EA 6000VX Micro Mapping XRF

» EA 6000VX Micro Mapping XRF

EA6000VX XRF Analyzer Equipped with

High-Speed Mapping Function from Hitachi High Tech

Equipped with high-speed mapping function, EA6000VX HSFinder enables complex measurement that has been difficult with conventional analyzers. EA6000VX meets such requirements as measurement of microscopic areas without disassembling the product. The EA6000VX can analyse large objects and small fragments. It can also analyse multiple objects in one run.


High Speed Mapping 

High count rate detector of 150,000cps at maximum and large stage that scans 250mm x 200mm area at maximum enables high speed mapping. In 100mm x 100mm area mapping,SEA6000VX detects and locates lead contained in terminal of mounting board in a few minutes.

Continuous multi-point measurements

Up to 500 points can be set and continuously measured as with an auto-sampler. Measuring large samples exhibits tremendous throughput.
continuous multi-point measurements

High Precision Overlap Function

By high precision analysis over a wide area enabled by the complete overlap of sample image and mapping image by employing a telecentric optic system and high precision XY stage, areas that contain target elements are easily specified. Whole area of 250mm x 200mm is shown in top view, and position precision of zoom in from wide view is within 100um.

Microscopic area coating thickness measurements

The EA6000VX is capable of coating thickness measurements typical of the FT series including coating thickness measurement of ultra-thin Au films. Analysis of hazardous substances such as Pb in plating can be measured simultaneously with coating thickness measurements. For example, possibilities include composition measurement of hazardous substances in Pb-free solder plating, Sn plating of lead frames, and electroless Ni plating.

Light Element Measurement

with He purge option, EA6000VX is able to measure light elements from Na. Its stable and unique system that purges He only during measurement lowers the running cost.
He purge system

See-through Mapping Fuction

Beginning with Pb on internal boards, various mapping images of elements can be obtained without taking apart products with unknown internal structures, such as laptop computers and cell phones. By comparing mapping images of elements obtained by penetrating X-rays, various information can be obtained about the structure and internal components. see-through mapping fuction

Contaminant Analysis

With \its high speed mapping function, EA6000VX is able to detect and locate small metal contaminant sized around tens of micro meters in wide measurement area (at maximum of 250mm x 200mm). Small or minute amount of contaminant contained in organic substances including resin, can be also detected.

Technologically Enhanced Operability -Auto Approach and Sample Collision Prevention

Auto Approach Function measures the sample height and automatically adjusts the distance between sample and detector so that operator can easily measure samples with complicated shapes. In the case of manual operation, Sample Collision Prevention Mechanism prevents sample damages.

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